From: Improvement of the detection efficiency calibration and homogeneity measurement of Si-SPAD detectors
Scan number
z-position (mm)
x-center (mm)
y-center (mm)
Diameter (mm)
1
13.6
235.11
6.26
0.35
2
15.6
235.12
6.29
3
14.6
6.28
0.20