Fig. 6
From: Improvement of the detection efficiency calibration and homogeneity measurement of Si-SPAD detectors
a Relative deviation of the detection efficiency of the investigated Si-SPAD detectors for the case when different laser beam diameters are used. The relative deviation is normalized to a beam diameter ϕ B of approx. 20 µm; b relative deviation of the detection efficiency as a function of the diameter ratio of the beam and the active area of the investigated Si-SPAD detectors