Fig. 3From: Improvement of the detection efficiency calibration and homogeneity measurement of Si-SPAD detectorsScanning results for different z -positions using the SPCM-AQR (PerkinElmer) detector. a, b Scan in front of and behind the front focal plane of the objective, i.e. predominantly Gaussian profiles with their fitting curves and c scan at the front focal plane of the objective and therefore nearly rectangular profileBack to article page