Fig. 1From: Improvement of the detection efficiency calibration and homogeneity measurement of Si-SPAD detectors a Scheme and b photograph of the setup used for the calibration of the Si-SPAD detection efficiency by using an integrating sphere with an attached Si-photodiode as a reference standard detector. Si-photodiode: Hamamatsu S1227 66BR, Integrating sphere: Labsphere IS 40, Objective: Mitutoyo M-Plan Apo 20×, Tunable laser: New Focus 6312)Back to article page