Table 4 Average values \(\langle d \rangle \) and standard deviations \(\sigma _d\) extracted for the Al grain size distributions for the different substrates in Fig. 7, using the log-normal distribution function
Substrate | \(\hbox {Al}_{2}\hbox {O}_{3}\) | Si | \(\hbox {Si}_{3}\hbox {N}_{4}\) | \(\hbox {SiO}_{2}\) | \(\hbox {SiO}_{2}\) (cold) |
|---|---|---|---|---|---|
\(\langle d \rangle \) (nm) | 92 ± 8 | 78 ± 8 | 98 ± 8 | 85 ± 9 | 62 ± 4 |
\(\sigma _d\) (nm) | 46 ± 10 | 40 ± 10 | 57 ± 11 | 48 ± 12 | 34 ± 5 |