Table 3 The resulting average grain sizes \(\langle d \rangle \) for the top and the bottom Al layers for the four different sample groups A–D
Sample group | A | B | C | D |
|---|---|---|---|---|
\(\hbox {t}_{{\mathrm{ox}}}\) (min) | 10 | 10 | 30 | 30 |
\(\hbox {p}_{{\mathrm{ox}}}\) (mbar) | 0.01 | 0.1 | 0.01 | 0.1 |
\(\langle d \rangle _{{\mathrm{t}}}\) (nm) | 125 | 135 | 83 | 82 |
\(\langle d \rangle _{{\mathrm{b}}}\) (nm) | 24 | 27 | 29 | 30 |