Table 2 Average values \(\langle d \rangle \) and standard deviations \(\sigma _d\) extracted for the Al grain size distributions for the 15 and 60 nm-thick films in Fig. 4, using the log-normal distribution function
Thickness | 60 nm | 15 nm |
|---|---|---|
\(\langle d \rangle \) (nm) | 92 ± 8 | 38 ± 3 |
\(\sigma _d\) (nm) | 45 ± 10 | 18 ± 4 |