Figure 1

Roughness layer model comparison. (a) Common ellipsometry evaluation model: the RL is treated as an effective medium approximation (EMA) of 50% material and 50% void. (b) Realistic roughness layer derived from a cross section through an AFM picture of a DiMethoxyethyl-PTCDI film (Figure 2a). By z-slicing the RL into infinitesimal thin slices and treating each slice with an individual EMA material ratio, a more precise RL model can be derived.