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Table 1 Results obtained from the three scans performed with the SPCM-AQR Si-SPAD detector at different z-positions

From: Improvement of the detection efficiency calibration and homogeneity measurement of Si-SPAD detectors

Scan number

z-position (mm)

x-center (mm)

y-center (mm)

Diameter (mm)

1

13.6

235.11

6.26

0.35

2

15.6

235.12

6.29

0.35

3

14.6

235.11

6.28

0.20

  1. The values (x, y and z) obtained from scan Nr. 3 are the final alignment positions where the Si-SPAD must be placed for its calibration. The diameter at this position corresponds approximatly to the diameter (ϕ D = 180 μm) of the detector active area
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