Fig. 5
From: Improvement of the detection efficiency calibration and homogeneity measurement of Si-SPAD detectors
Relative spatial detection efficiency of the Si-SPAD detectors: a SPCM-AQR (PerkinElmer) detector, sensor area with diameter ϕ D1 of approx. 180 µm, determined with a beam diameter ϕ B of approx. 10 µm; b PDM (Micro Photon Devices detector, sensor area with diameter ϕ D2 of approx. 50 µm, determined with a beam diameter ϕ B of approx. 10 µm. The circles labeled with the number 1 and 2 show the regions selected for determining the homogeneity of the detector active area; i.e. the relative standard deviation of the detector spatial responsivity was calculated for these regions