Skip to main content
SpringerPlus
Fig. 7 | SpringerPlus

Fig. 7

From: Correlation between Al grain size, grain boundary grooves and local variations in oxide barrier thickness of Al/AlOx/Al tunnel junctions by transmission electron microscopy

Fig. 7

(color online) The log-normal grain size distributions for 60 nm Al deposited on different substrates, with parameters listed in Table 4. The standard deviation of the distribution did not change significantly with substrate material nor did the choice of substrate significantly affect the expectation value of the grain size. However, a lower substrate temperature during growth (\(-108\,^{\circ }\)C) reduces the grain size substantially as shown by the black curve

Back to article page