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Table 2 Process parameters applied for the experiments investigating the C2/Hα-ratio influence

From: Simultaneous synthesis of nanodiamonds and graphene via plasma enhanced chemical vapor deposition (MW PE-CVD) on copper

T (°C)

960

960

960

C2/Hα

0.3

0.14

0.045

p (mbar)

50

50

50

P (kW)

1

1

1

Methane concentration

0.27

0.14

0.01

  1. In italic letters the desired C2/Hα-ratio is depicted. Using the information provided by the Figs. 2 and 3, sets of parameters can be found that facilitate the changes C2/Hα-ratio while the plasma ball dimensions and the substrate–plasma-interaction remains unchanged
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