Pressure | Power | Cleaning process | Synthesis |
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Time | H2 flow | CH4 flow | Time | H2 flow | CH4 flow |
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50–65 mbar | 1 kW | 20 min | 200 sccm | – | 8 min | 118.8–84 sccm | 1.2–36 sccm |
- Relevant process parameters and the maximum and minimum values are depicted. While the cleaning process has been held constant as well as the process time, different microwave powers, process pressures and gas flows have been applied. The total gas flow, however, has not been alternated and has been kept at a constant value of 120 sccm during the process